Fabrication technology used to create high-aspect-ratio microstructures
This article is about a lithographic fabrication technology. For other uses, see liga (disambiguation).
The X-ray LIGA process was originally developed at the Forschungszentrum Karlsruhe, Germany, to produce nozzles for uranium enrichment.SEM picture of a polymer LIGA structure made by molding. Smallest polymer width is 6 μm; polymer height is 120 μm, the aspect ratio is, therefore, 20.SEM picture of a polymer LIGA structure made by x-ray lithography. Step length is 3 μm, step height is 0.7 μm. The pattern extends downwards towards the substrate for 150 μm leading to an aspect ratio of the contour of 200.
