Low-temperature polycrystalline silicon

Low-temperature polycrystalline silicon (LTPS) is polycrystalline silicon that has been synthesized at relatively low temperatures (~650 °C and lower) compared to in traditional methods (above 900 °C). LTPS is important for display industries, since the use of large glass panels prohibits exposure to deformative high temperatures. More specifically, the use of polycrystalline silicon in thin-film transistors (LTPS-TFT) has high potential for large-scale production of electronic devices like flat panel LCD displays or image sensors.[1]

  1. ^ Fonash, Stephen. "Low Temperature Crystallization and Patterning of Amorphous Silicon Film On Electrically Insulating Substrates." United States Patent (1994). Print.

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