Back Wolfram(VI)fluoried Afrikaans فلوريد التنغستن السداسي Arabic تنقستن هقزافلوئورید AZB Fluorid wolframový Czech Wolfram(VI)-fluorid German Εξαφθοριούχο βολφράμιο Greek Hexafluoruro de wolframio Spanish تنگستن هگزافلوئورید Persian Volframiheksafluoridi Finnish Hexafluorure de tungstène French
 Solid WF6 melting into liquid WF6
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| Names | |||
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| IUPAC names
Tungsten hexafluoride
Tungsten(VI) fluoride | |||
| Identifiers | |||
3D model (JSmol)
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| ECHA InfoCard | 100.029.117 | ||
| EC Number |
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PubChem CID
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| UNII | |||
| UN number | 2196 | ||
CompTox Dashboard (EPA)
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| Properties | |||
| WF6 | |||
| Molar mass | 297.830 g/mol | ||
| Appearance | Colorless gas | ||
| Density | 12.4 g/L (gas) 4.56 g/cm3 (−9 °C, solid) | ||
| Melting point | 2.3 °C (36.1 °F; 275.4 K) | ||
| Boiling point | 17.1 °C (62.8 °F; 290.2 K) | ||
| Hydrolyzes | |||
| −40.0·10−6 cm3/mol | |||
| Structure | |||
| Octahedral | |||
| zero | |||
| Hazards | |||
| Occupational safety and health (OHS/OSH): | |||
Main hazards
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Toxic, corrosive; gives HF on contact with water | ||
| GHS labelling:[1] | |||
   
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| Danger | |||
| H280, H301+H311, H314, H330 | |||
| P260, P264, P264+P265, P270, P271, P280, P284, P301+P316, P301+P330+P331, P302+P352, P302+P361+P354, P304+P340, P305+P354+P338, P316, P317, P320, P321, P330, P361+P364, P363, P403+P233, P405, P410+P403, P501 | |||
| NFPA 704 (fire diamond) | |||
| Flash point | Non-flammable | ||
| Safety data sheet (SDS) | ChemAdvisor | ||
| Related compounds | |||
Other anions
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Tungsten hexachloride Tungsten hexabromide | ||
Other cations
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Chromium(VI) fluoride Molybdenum(VI) fluoride | ||
Related compounds
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Tungsten(IV) fluoride Tungsten(V) fluoride | ||
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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Tungsten(VI) fluoride, also known as tungsten hexafluoride, is an inorganic compound with the formula WF6. It is a toxic, corrosive, colorless gas, with a density of about 13 kg/m3 (22 lb/cu yd) (roughly 11 times heavier than air).[2][3] It is the only known gaseous transition metal (or d-block) compound and the densest known gas under standard ambient temperature and pressure (298 K, 1 atm).[4] WF6 is commonly used by the semiconductor industry to form tungsten films, through the process of chemical vapor deposition. This layer is used in a low-resistivity metallic "interconnect".[5] It is one of seventeen known binary hexafluorides.
- ^ "Tungsten hexafluoride". pubchem.ncbi.nlm.nih.gov.
- ^ Roucan, J.-P.; Noël-Dutriaux, M.-C. Proprietes Physiques des Composes Mineraux. Ed. Techniques Ingénieur. p. 138.
- ^ Gas chart (Wayback Machine archive 7 September 2022)
- ^ Cite error: The named reference
b1was invoked but never defined (see the help page). - ^ "Tungsten and Tungsten Silicide Chemical Vapor Deposition". CVD Fundamentals. TimeDomain CVD.